Metal Sputtering Targets:
Shape we provide: discs, plate, rod, tube, sheet, Delta also per drawing
Sputtering targets manufacturing method:
hot pressing (HP) | hot / cold isostatic pressing (HIP, CIP) |
vacuum melting | vacuum sintering
Spezifications:
Diameter: 355.6mm (14 ") max. Single piece
Single piece Size: Length: <1500mm, Width: <300mm, Thickness:> 1mm
If larger size than this is needed, we can do it as tiles joint by 45 degree or 90 degree.
We have only listed popular materials. Please feel free to contact us with any special requirements.
Metal Sputtering / Material name Targets
| Metal Sputtering Targets | Metal Sputtering Targets | Metal Sputtering Targets | ||||||
|---|---|---|---|---|---|---|---|---|
| Material name | Purity | Material name | Purity | Material name | Purity | |||
| Aluminum | Al | 99.99%, 99.999% | Hafnium | Hf | 99.5%, 99.9% (with Zr) | Samarium | Sm | 99.9%, TREM: 99% |
| Antimony | Sb | 99.99%, 99.999% | Holmium | Ho | 99.9%, 99.99% TREM: 99% | Scandium | Sc | 99.9%, 99.99% TREM: 99% |
| barium | Ba | 99.3%, 99.9%, 99.95% | Indium | In | 99.9%, 99.99%,99.999% | Selenium | Se | 99.99%, 99.999% |
| beryllium | Be | 99.99% | Iridium | Ir | 99.95% | Silicon | Si | 99.999%, 99.9999% |
| Bismuth | Bi | 99.99%, 99.999% | Iron | Fe | 99.9%, 99.99% | Silver | Ag | 99.95%,99.99% |
| Boron | B | 99.9% | Lanthanum | La | 99.5%, 99.9%, TREM: 99% | Tantalum | Ta | 99.95%, 99.99% |
| cadmium | Cd | 99.99% | Lead | Pb | 99.99% | Tellurium | Te | 99.99%,99.999% |
| Calcium | Ca | 99.5%, 99.9%, 99.95% | Lanthanum | La | 99.5%, 99.9%, TREM: 99% | Terbium | Tb | 99.9%, 99.99% TREM: 99% |
| Carbon(Graphite) | C | 99.95% | Lead | Pb | 99.99% | Thulium | Tm | 99.9%, 99.99% TREM: 99% |
| Cerium | Ce | 99.5%, 99.9%, TREM: 99% | Lithium | Li | 99.5% | Tin | Sn | 99.99%, 99.999% |
| Chromium | Cr | 99.5%, 99.9%, 99.95% | Lutetium | Lu | 99.99% TREM: 99% | Titanium | Ti | 99.7%, 99.99%, 99.995%, 99.999% |
| Cobalt | Co | 99.9%, 99.95%, 99.98%, 99.995% | Magnesium | Mg | 99.95% | Tungsten | W | 99.95% |
| Copper | Cu | 99.99%, 99.999% | Manganese | Mn | 99.9% | Vanadium | V | 99.9% |
| Dysprosium | Dy | 99.5%, 99.9%, TREM: 99% | Molybdenum | Mo | 99.95% | ytterbium | Yb | 99.9%, 99.99% TREM: 99% |
| Erbium | Er | 99.9%, TREM: 99% | Neodymium | Nd | 99.5%, 99.9%, TREM: 99% | Yttrium | Y | 99.9%, 99.99% ， TREM> 99% |
| Europium | Eu | 99.95, 99.99%, TREM: 99% | Nickel | Ni | 99.9%, 99.95%, 99.995%, 99.999% | Zinc | Zn | 99.99% |
| Gadolinium | Gd | 99.9%, 99.99% TREM: 99% | Niobium | Nb | 99.95% | Zirconium | Zr | 99.2%, 99.5%, 99.9% with Hf |
| Gallium | Ga | 99.99% | Osmium | Os | 99.9%, 99.95% | |||
| Germanium | Ge | 99,999% | Platinum | Pt | 99.95%, 99.99% | |||
| Gold | Au | 99.95%, 99.99% | Praseodymium | Pr | 99.5%, TREM: 99% | |||
| Rhenium | Re | 99.95%, 99.99% | ||||||
| Ruthenium | Ru | 99.95% |